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Sputtering Target

Barium Titanate (BaTiO3) Sputtering Targets

Time:2020/05/22 丨 source:Fast Silver 丨 visit count:

Barium Titanate (BaTiO3) Sputtering Target

BaTiO3 sputtering targets are used for thin film capacitor.

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Specifications
Material Type Barium Titanate
Symbol BaTiO3
Purity 99.99%
Size 1.00" Dia. x 0.125" Thick ~8.00" Dia x  0.250" Thick / Custom
Package Unit 1pc
Theoretical Density (g/cc) 6.02 Z Ratio 0.464
Color/Appearance Gray, Crystalline Solid Sputter RF
Comments Decomposes over 750°C. Type of Bond Indium, Elastomer
Melting Point (°C) 1,625 Max Power Density
(Watts/Square Inch)
20*
Coefficient of Thermal Expansion 11 x 10-6/K Comments Gives Ba. Co-evap and Sputter OK.
 

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